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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper PTuB1
  • https://doi.org/10.1364/PHAST.2006.PTuB1

Laser Crystallization for Flat Panel Display

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Abstract

We will review the status of current laser based crystallization processes, and discuss the specifications and the critical design aspects of the laser and of the optical system developed for the TCZ production tool.

© 2006 Optical Society of America

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