Nano-Imprint Lithography: From the Lab to the Factory

Norman E. Schumaker

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications, Systems and Technologies
Technical Digest (CD) (Optica Publishing Group, 2005),
paper PThC2

Nano-Imprint Lithography: From the Lab to the Factory

Norman E. Schumaker

Photonic Applications Systems Technologies Conference 2005

Baltimore, Maryland United States
23–28 May 2005
ISBN: 1-55752-770-9

From the session
Photonics in Nanotechnology -- Nanolithography (PThC)

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N. E. Schumaker, "Nano-Imprint Lithography: From the Lab to the Factory," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications, Systems and Technologies, Technical Digest (CD) (Optica Publishing Group, 2005), paper PThC2.

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