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Conferences > PhAST > 2004 > PTuB > PTuB1
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PTuB1

Ultrahigh precision machining using femtosecond laser sources

Andreas Ostendorf

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Abstract

Femtosecond laser matter interaction is characterized by sharp melting and ablation thresholds for metals and dielectrics. By adjusting the laser fluence, optics, and processing strategy one can fabricate structures with nanometer accuracy or dimension.

© 2004 Optical Society of America

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