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Conferences > PhAST > 2004 > PThA > PThA1
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PThA1

200-W 2nd harmonic of DPSS YAG laser for poly-Si TFT manufacture

Tetsuo Kojima, Eiichi Tanaka, Kazutoshi Morikawa, Tatsuki Okamoto, Junichi Nishimae, Yukio Sato, and Masaaki Tanaka

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Abstract

200 W of output power was generated by a 2nd harmonic of a Q-switched diode-pumped solid-state Nd:YAG laser at a repetition rate of 4 kHz.

© 2004 Optical Society of America

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