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Fabrication of Cubic Micron-Scale 3D Metamaterial Resonators

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Abstract

We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated.

© 2010 Optical Society of America

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