We studied the photo-assisted wet-etching effects in lithium niobate crystals with different compositions under different illuminating light wavelengths of 532nm, 488nm and 351nm. It is found that the properties of the photo-assisted wet-etching effect depend strongly on both the composition and the illuminating light. This phenomenon is of interest to the study and the fabrication of photonic surface-microstructure in lithium niobate. The involved mechanism is also qualitatively explained in this paper.

© 2005 Optical Society of America

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