By using the direct-write e-beam technique with liquid phase epitaxy LiNbO<sub>3</sub> thin films, we have successfully produced sub-micron domain structures for achieving dynamically switchable filters in a periodically poled lithium niobate (PPLN) waveguide. The effects of direct-write e-beam parameters are investigated to achieve sub-micron periodic domain structures in homoepitaxial liquid phase epitaxy (LPE) LiNbO<sub>3</sub> thin films. More regular structures appear at acceleration voltages higher than 20 kV and areal dose range 350 µC/cm<sup>2</sup> ~ 450 µC/cm<sup>2</sup> with lower scanning speeds. Under these optimal conditions, an approximately 500 µm-long grating of a 1.1 µm period, consisting ~180 nm domains is achieved.

© 2005 Optical Society of America

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