We demonstrate the fabrication of planar interdigited micro-supercapacitors by using a high-spatial-resolution direct laser writing setup. The interspace and the width of the electrodes are accurately controlled by the laser patterning at the nanometer scale precision to shorten the mean ionic path. As a result, supercapacitors with performance exceeding the state-of-the-art have been achieved.

© 2015 Optical Society of America

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