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Conferences > OSE > 2014 > RW4B > RW4B.5

Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile

Andreas Fell, Sybille Hopman, Nandor Vago, Sven Kluska, Evan Franklin, and Klaus J. Weber

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Abstract

A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous “single speckle” pattern.

© 2014 Optical Society of America

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