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Deposition of luminescent CaxSiyNzOp:Eu2+ thin films using combinatorial DC/rf magnetron sputtering

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Abstract

CaxSiyNzOp:Eu2+ spectral conversion thin films were deposited using reactive combinatorial magnetron co-sputtering. A gradient in film composition is found in the deposited films, with areas showing emission of visible light under UV excitation.

© 2012 Optical Society of America

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