Abstract

The paper addresses the deposition of high precision optical coatings on curved substrates, i.e. lenses. A band pass filter on the convex side of a lens with a constant central wavelength across the surface was produced. The coating also has a broad blocking range from 360 to 1100nnm. A combination of a sub-rotation and uniformity masks was used. The shape of the masks was designed with the particle-in cell Monte Carlo method described in. The existing model framework was expanded to compute deposition profiles on moving 3D substrates. Some surprising effects regarding the behavior the magnetron system were also observed. An excellent agreement of theory with experiment could be reached when full 3D plasma simulation is applied.

© 2019 The Author(s)

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