Coated optical components with low surface form deviations require particular knowledge on thin-film stress. Contributing factors to stress in PARMS coatings are evaluated and results of laser mirrors, deposited on thin substrates, are presented.

© 2019 The Author(s)

PDF Article
More Like This
Stress Compensation by Deposition of a Nonuniform Corrective Coating

James B. Oliver, John Spaulding, and Brian Charles
WC.2 Optical Interference Coatings (OIC) 2019

Stress analysis in thin films: towards perfectly compensated mirrors

Thomas Begou and Julien Lumeau
TD.5 Optical Interference Coatings (OIC) 2016

Investigation of the Anisotropic Stress and Optoelectronic Properties of MZO Film deposited on flexible substrate with RF Magnetron Sputtering

Hsi-Chao Chen, Guan-Ting Peng, Tan-Fu Liu, Ru-Fong Lai, Min-Yi Jiang, Pin-Ju Yao, Ming-Sian Yan, and Chun-Hao Chang
WC.7 Optical Interference Coatings (OIC) 2019


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription