Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)

Ralph Faber; Richard Meagher

doi:10.1364/OIC.2019.WB.6

Optical Interference Coatings Conference (OIC) 2019
OSA Technical Digest (Optica Publishing Group, 2019),
paper WB.6
•https://doi.org/10.1364/OIC.2019.WB.6

Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)

Ralph Faber and Richard Meagher

Optical Interference Coatings 2019

Santa Ana Pueblo, New Mexico United States
2–7 June 2019
ISBN: 978-1-943580-58-3

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R. Faber and R. Meagher, "Volume Production of High Quality Optical Coatings by Plasma Assisted DC-Magnetron Sputtering (PAPMS)," in Optical Interference Coatings Conference (OIC) 2019, OSA Technical Digest (Optica Publishing Group, 2019), paper WB.6.

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Abstract

Plasma Assisted Pulsed DC Magnetron Sputtering (PAPMS) results in low loss, high performance optical coatings. Multi-layers using metals and metal-oxides demonstrate that this technology is suitable for volume production of complex high quality coatings.

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