Abstract

The technique of Broadband Optical Endpoint Monitoring is growing to meet the demand of a flexible monitoring technique necessary to produce complex optical coating. However, there are only a limited number of options currently available in the market that can demonstrate effective broadband monitoring of multilayers. Here we implemented a hybrid broadband optical endpoint monitoring (BBM) with an additional Virtual Deposition Process (VDP). The BBM is demonstrated on multilayer designs. With the help of the VDP, most designs can be deposited successfully on their first attempt, avoiding costly trials and errors.

© 2019 The Author(s)

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