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Optical Characteristics of Low-Refractive-Index Optical Thin Films Fabricated by Sputtering and Electron-Beam Vacuum Deposition

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Abstract

Low-refractive-index thin films with porous structures were fabricated by simultaneous sputtering and electron-beam vacuum deposition. This low refractive index optical thin films can withstand ultrasonic cleaning which are having practical mechanical properties.

© 2019 The Author(s)

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