Abstract

Rotational Spatial PEALD has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ± 1% has been demonstrated for Nb2O5 deposited at 1.4 Å/second, and for SiO2 deposited at 6 A/second.

© 2019 The Author(s)

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription