Analysis of the in situ reflectance spectra during sputtering of gold allows for the characterization of different growth regimes throughout the deposition. The validity of this method is assessed and discussed.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription