Optical properties of uniform and nanostructured TiN thin films

Yi-Jun Jen; Ming-Zheng Li; Zheng-Xing Li; Meng-Jie Lin

doi:10.1364/OIC.2019.TA.8

Optical Interference Coatings Conference (OIC) 2019
OSA Technical Digest (Optica Publishing Group, 2019),
paper TA.8
•https://doi.org/10.1364/OIC.2019.TA.8

Optical properties of uniform and nanostructured TiN thin films

Yi-Jun Jen, Ming-Zheng Li, Zheng-Xing Li, and Meng-Jie Lin

Optical Interference Coatings 2019

Santa Ana Pueblo, New Mexico United States
2–7 June 2019
ISBN: 978-1-943580-58-3

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Y. Jen, M. Li, Z. Li, and M. Lin, "Optical properties of uniform and nanostructured TiN thin films," in Optical Interference Coatings Conference (OIC) 2019, OSA Technical Digest (Optica Publishing Group, 2019), paper TA.8.

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Abstract

TiN thin films and nanorod array are grown in magnetron sputtering system. The tailored permittivity via changing the nitrogen flow rate is reported. The polarization dependent plasmonic modes are investigated by analyzing the absorptance spectra.

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