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Conferences > OIC > 2016 > WC > WC.7

Optimized procedure for in-situ optical monitoring of multilayer structures

M. Vignaux, F. Lemarchand, T. Begou, C. Grezes-Besset, and J. Lumeau

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Abstract

We present a Virtual Deposition Software able to predict the final result of a manufactured thin film filter considering specific direct and indirect monitoring strategies. Sources of errors include in situ noise measurements as well as uncertainties on layer refractive indices. Then an optimal multi-approach monitoring strategy is simulated on a Fabry-Perot-based narrow bandpass filters.

© 2016 Optical Society of America

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