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Conferences > OIC > 2016 > WC > WC.4

Broadband optical monitoring of optical thin films in large ion-beam sputtering machine

David Hofman, Benoît Sassolas, Christophe Michel, Laurent Balzarini, Laurent Pinard, Julien Teillon, Eleonore Barthelemy-Mazot, Bertrand David, Bernard Lagrange, and Gianpietro Cagnoli

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Abstract

A real-time optical monitoring of coated thin films is being installed in a large coating machine. An optical system and a coating simulation software were developped, predicting the success rate of the deposition.

© 2016 Optical Society of America

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