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Conferences > OIC > 2016 > WC > WC.2

Ellipsometric monitoring of the refractive index evolution versus temperature for various metal oxides commonly used in interference filters

A. Sytchkova, R. Vernhes, B. Baloukas, M. L. Grilli, L. Martinu, and A. Piegari

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Abstract

The optical properties of room temperature sputter-deposited metal oxide films on fused silica substrates are investigated by in situ spectroscopic ellipsometry over a wide temperature range.

© 2016 Optical Society of America

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