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Conferences > OIC > 2016 > WA > WA.1

Magnetron Sputtering of Precision Optical Coatings Enabled by Process Stability of Rotatable Cathodes

Stefan Bruns, Michael Vergöhl, and Tobias Zickenrott

Open Access Open Access

Abstract

Cylindrical rotatable cathodes deliver huge material amounts under stable conditions as needed for interference coatings. Sub-stoichiometric targets and plasma oxidation produce low absorbance and virtually no drift of refractive index associated with changeless material uniformity.

© 2016 Optical Society of America

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