Long Term Dependence of the Internal Stress of Lanthanum Titanium Oxide (H4) Optical Thin Films

Masashi Takegami; Saki Narita; Ryota Nakano; Hiroshi Murotani

doi:10.1364/OIC.2016.ThD.7

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper ThD.7
•https://doi.org/10.1364/OIC.2016.ThD.7

Long Term Dependence of the Internal Stress of Lanthanum Titanium Oxide (H4) Optical Thin Films

Masashi Takegami, Saki Narita, Ryota Nakano, and Hiroshi Murotani

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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Substrate and Coating Properties (ThD)

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M. Takegami, S. Narita, R. Nakano, and H. Murotani, "Long Term Dependence of the Internal Stress of Lanthanum Titanium Oxide (H4) Optical Thin Films," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper ThD.7.

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Abstract

This study examined the basis of the time dependence of the internal stress of lanthanum titanium oxide (H4) optical thin films. Non-optimal deposition conditions provided deposited films exhibiting time-dependent variation 10 years after deposition.

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