Portable Profilometer for Accurate Surface Profile Measurements

D. Lyakhov; I. Kozlov; A. Tikhonravov

doi:10.1364/OIC.2016.ThB.10

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper ThB.10
•https://doi.org/10.1364/OIC.2016.ThB.10

Portable Profilometer for Accurate Surface Profile Measurements

D. Lyakhov, I. Kozlov, and A. Tikhonravov

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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OIC 2016 Measurement Problem Results and Characterization (ThB)

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D. Lyakhov, I. Kozlov, and A. Tikhonravov, "Portable Profilometer for Accurate Surface Profile Measurements," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper ThB.10.

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Abstract

The previously developed modified Shack-Hartmann method is applied to construct a portable device for an accurate reconstruction of optical surface profile. Device accuracy is verified using interferometric measurements.

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