The effects of residual background air on the performance of Co/C multilayers are investigated. The reflectivity of Co/C films decreases with increasing background pressure, which can be attributed to the increasing inter-diffusion between Co and C layers.

© 2016 Optical Society of America

PDF Article
More Like This
Structure and stress properties of W/Si multilayers with different background pressure and working pressure

Runze Qi, Qiushi Huang, Yang Yang, Zhong Zhang, and Zhanshan Wang
MC.5 Optical Interference Coatings (OIC) 2016

Structural and EUV performance of Si/C multilayers deposited under different working pressure

Qiang Yi, Qiushi Huang, Xiangmei Wang, Yang Yang, Xiaowei Yang, Zhong Zhang, Zhanshan Wang, Rongkun Xu, Taiping Peng, Hongjun Zhou, and Tonglin Huo
TA.4 Optical Interference Coatings (OIC) 2016

Thermal and temporal stability of nitridated Ru/B4C multilayer for high flux monochromator application

Yang Liu, Qiushi Huang, Hui Jiang, Runze Qi, Yufei Feng, Guangzhi Yin, Xingmin Zhang, Zhong Zhang, and Zhanshan Wang
FB.2 Optical Interference Coatings (OIC) 2019


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription