Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2016 > MC > MC.7

Scatterless SiO2/Nb2O5 multi-layered UV-IR cut filter prepared by RAS system

T. Sugawara, S. Agatsuma, S. Samori, and E. Nagae

Not Accessible

Your library or personal account may give you access

Abstract

Scatterless SiO2/Nb2O5 multi-layered UV-IR cut filters can be prepared by biased RAS (Radical Assisted Sputtering) system. By this biased RAS system, ion bombardment toward the large-area film surface occurs at the same time as sputtering, which results in the smooth and uniform film surface. Using the ion bombardment effect, therefore, the extreme-low scatter and excellent UV and near-IR blocking characteristics can be achieved for the SiO2/Nb2O5 multi-layered filters.

© 2016 Optical Society of America

PDF Article
More Like This
Scatterless SiO2/TiO2 multi-layered thick UV-IR cut filter prepared by EPD system

K. Okada, S. Ito, Y. Jiang, M. Miyauchi, S. Samori, and E. Nagae
MC.6 Optical Interference Coatings (OIC) 2016

RAS bias voltage coating

S. Samori, T. Sugawara, S. Agatsuma, M. Ishida, S. Yamamoto, M. Miyauchi, Y. Jiang, and E. Nagae
WC.3 Optical Interference Coatings (OIC) 2013

Investigation of stress mechanism of SiO2 and Nb2O5 thin films sputtered on flexible substrate with finite element method

Hsi-Chao Chen, Chen-Yu Huang, and Po-Wei Cheng
WE.4 Optical Interference Coatings (OIC) 2016

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use