Phase separating coating by filtered Ion Beam Sputtering

M. Jupé; M. Jupé; S. Malobabic; T. Willemsen; T. Willemsen; K. Schuba; D. Ristau; D. Ristau

doi:10.1364/OIC.2016.MB.9

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper MB.9
•https://doi.org/10.1364/OIC.2016.MB.9

Phase separating coating by filtered Ion Beam Sputtering

M. Jupé, S. Malobabic, T. Willemsen, K. Schuba, and D. Ristau

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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M. Jupé, S. Malobabic, T. Willemsen, K. Schuba, and D. Ristau, "Phase separating coating by filtered Ion Beam Sputtering," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper MB.9.

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Abstract

In high end optics particles lead often to optical losses. In this paper a filtered IBS technology is introduced to mitigate particle contamination. The device is studied in respect to material transport and particle reduction.

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