Progress in Optical Monitoring

Henrik Ehlers; Detlev Ristau

doi:10.1364/OIC.2013.WB.1

Optical Interference Coatings
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper WB.1
•https://doi.org/10.1364/OIC.2013.WB.1

Progress in Optical Monitoring

Henrik Ehlers and Detlev Ristau

Optical Interference Coatings 2013

Whistler Canada
16–21 June 2013
ISBN: 978-1-55752-970-1

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Optical Monitoring, Modeling and Deposition (WB)

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H. Ehlers and D. Ristau, "Progress in Optical Monitoring," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper WB.1.

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Abstract

Recent developments in optical monitoring of complex thin film optical filters opened the way towards deterministic production strategies. Different optical monitoring approaches, on-line error correction tools, hybrid monitoring concepts, and simulation methods are presented.

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