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Conferences > OIC > 2013 > ThA > ThA.6

A hybrid inorganic-organic barrier film deposited by magnetron sputtering

Cheng-Chung Lee, Meng-Chi Li, Shih-Fang Liao, Chin-Lun Wei, Sheng-Chieh Huang, and Chien-Cheng Kuo

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Abstract

A magnetron sputtering system with plasma polymerized organic monomer was developed. The barrier films, the best WVTR value of 7.6×10−2 g/m2/day, was deposited by magnetron sputtering coupled with HMDSO/O2 plasma polymerization.

© 2013 Optical Society of America

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