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Conferences > OIC > 2010 > WD > WD8

Effect of Thermal Annealing on the Residual Stress of Graded-index-like Films Deposited by RF Ion-Beam Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee

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Abstract

Composite film of Ta-Si oxide with graded-index-like films has been realized by using RF ion-beam sputtering. The influence of thermal annealing on residual stress of single layer composite films and graded-index-like films has been studied.

© 2010 Optical Society of America

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