Abstract

These residual stresses were compressive and decreased with the increasing of substrate temperature for BK-7 and Pyrex substrates. The residual stresses were tensile and decreased with the increasing of substrate temperature for Vycor substrates.

© 2010 Optical Society of America

PDF Article
More Like This
Tuning Residual Stress of Ion-beam Assisted Thin Films during annealing with Film Thickness and Substrate Temperature

Hsi-Chao Chen and Chen-Yu Huang
WD10 Optical Interference Coatings (OIC) 2010

Investigation of stress mechanism of SiO2 and Nb2O5 thin films sputtered on flexible substrate with finite element method

Hsi-Chao Chen, Chen-Yu Huang, and Po-Wei Cheng
WE.4 Optical Interference Coatings (OIC) 2016

Interface Stress of Oxide Thin Films Produced by DC Pulse Magnetron Sputtering Deposition

Kun-Hsien Lee, Chia-Chen Lee, Chien-Jen Tang, Cheng-Chung Jaing, His-Chao Chen, and Cheng-Chung Lee
WD7 Optical Interference Coatings (OIC) 2010

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription