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Heat Induced Structural Rearrangement and Crystallite Formation in Thin Films of Room Temperature Plasma-Polymerized Titanium (IV) Isopropoxide

Hao Jiang, Lirong Sun, John Grant, Kurt Eyink, Timothy Bunning, and Rachel Jakubiak

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Abstract

Analysis of plasma polymerized TiOxCyNz films annealed in the temperature range of 300-700°C, revealed different mechanisms responsible for film densification below 300°C and the formation of TiO2 crystalline phases at temperatures over 500°C.

© 2010 Optical Society of America

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