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Conferences > OIC > 2010 > ThC > ThC2

LID Technique for Absolute Thin Film Absorption Measurement: Optimized Concepts, Experimental Results and Advanced Prototype

Ch. Mühlig, S. Bublitz, S. Kufert, and U. Speck

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Abstract

Optimized concepts for laser induced deflection technique are applied for absolute thin film absorption measurements from DUV to IR wavelengths. Various experimental results, the achieved repeatability and an advanced prototype with high sensitivity and improved handling are presented.

© 2010 Optical Society of America

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