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Conferences > OIC > 2010 > MB > MB6

Magnetron sputtering deposition machine for 2-meter optics

Grégory Chauveau, Didier Torricini, Gilles Borsoni, Catherine Grèzes-Besset, Dragan Stojcevski, and Michel Lequime

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Abstract

A detailed presentation of this new magnetron sputtering machine, the largest in Europe for optical coatings, will be given. The main features of this equipment will be illustrated through a few representative achievements.

© 2010 Optical Society of America

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