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Scandium oxide thin films deposited by dual ion beam sputtering for high-power laser applications

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Abstract

Scandium oxide films were deposited using reactive dual ion beam sputtering. At 1 µm, the refractive index of the films is 1.95 and the absorption loss is 18.5 ppm. X-ray photoelectron spectroscopy showed oxygen defects.

© 2010 Optical Society of America

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