Optimization of TiO2 films prepared by reactive electron beam evaporation of Ti3O5

Özlem Duyar; Frank Placido; H. Zafer Durusoy

doi:10.1364/OIC.2007.TuEPDP1

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper TuEPDP1
•https://doi.org/10.1364/OIC.2007.TuEPDP1

Optimization of TiO₂ films prepared by reactive electron beam evaporation of Ti₃O₅

Özlem Duyar, Frank Placido, and H. Zafer Durusoy

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Ö. Duyar, F. Placido, and H. Z. Durusoy, "Optimization of TiO2 films prepared by reactive electron beam evaporation of Ti3O5," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper TuEPDP1.

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Abstract

We report the development of TiO₂ films by reactive electron beam evaporation, using a recently introduced Ti₃O₅ material as the starting material. The processing window to prepare high quality stoichiometric TiO₂ was found quite narrow.

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