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Optical Properties of Plasma Ion-Assisted Deposition Silicon Coatings: Application to the Manufacture of Blocking Filters for the Near-Infrared Region

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Abstract

We report on the preparation and characterization of the optical constants of silicon coatings deposited by electron-beam-gun with plasma-IAD. Through the fabrication of longwave-pass filters we assure the reliability of the optical constants we determined.

© 2007 Optical Society of America

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