Abstract

The SiC/Mg and B4C/Mo/Si multilayers were fabricated for He-II radiation at 30.4nm. The measured reflectivitier were 38.0% for SiC/Mg multilayer at incident angle 12 degree, and 32.5% for B4C/Mo/Si multilayer at 5 degree, respectively.

© 2007 Optical Society of America

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