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Fluoride antireflection coatings at 193nm by resistive heating boat

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Abstract

Fluoride materials, MgF2, AlF3, LaF3 and GdF3 are used for antireflection coatings at 193nm by resistive heating boat. Optical characteristics, microstructure, stress, and laser-induced damage threshold (LIDT) of the films have been investigated.

© 2007 Optical Society of America

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