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Determination of optical constants of thin films in the VUV and soft x-ray spectral region with synchrotron spectroscopic ellipsometry

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Abstract

Optical constants determination of thin films used in the XUV spectral region is experimentally demonstrated with BESSY II synchrotron ellipsometry, which can provide continuous, precise spectra of optical constants over a broadband XUV spectral region.

© 2007 Optical Society of America

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