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Simultaneous absorption, scattering and fluorescence mappings for defect characterization on UV optical coatings and substrates

L. Gallais and M. Commandré

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Abstract

We present an experimental set-up, based on the laser induced deflection technique, to measure simultaneously the 244nm laser absorption, scattering and fluorescence with a high sensitivity and resolution. Application examples are given on UV coatings and substrates.

© 2004 Optical Society of America

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