We report on our recent achievements of the development of measurement systems to determine the light scattering of optical coatings and substrates in a wavelength range from the VUV to the IR spectral region.

© 2004 Optical Society of America

PDF Article
More Like This
Instrument for light scatter measurements at 157 nm and 193 nm

Jörg Steinert, Stefan Gliech, Marcel Flemming, and Angela Duparré
ThA8 Optical Interference Coatings (OIC) 2001

Assessment of AR coated CaF2 DUV optical components

Jue Wang and Robert L. Maier
WF6 Optical Interference Coatings (OIC) 2004

Reduction of Light Scattering from Contamination by Thin Film Coating Design

Alexander von Finck, Yuan Wang, Sven Schröder, Steffen Wilbrandt, Olaf Stenzel, and Angela Duparré
TC.7 Optical Interference Coatings (OIC) 2016


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription