Abstract
A dedicated set up is build to obtain localized transmittance and reflectance spectral measurements. The spatial resolution ranges from 50 µm up to 2 mm and the spectral resolution is about 5 nm. This apparatus can be used to study the index and thickness uniformity on single layers in order to determine and optimize the characteristics of the deposition chamber. It can also be used to measure the optical characteristics of intended non uniform coatings such as linearly variable filters.
© 2004 Optical Society of America
PDF ArticleMore Like This
Eckart K. Hussmann and Hans J. Becker
WA6 Optical Interference Coatings (OIC) 1984
Johannes Swartling, Antonio Pifferi, Ekaterine Chikoidze, Alessandro Torricelli, Paola Taroni, Rinaldo Cubeddu, and Stefan Andersson-Engels
WF17 Biomedical Topical Meeting (BIOMED) 2004
Matthias List, Christian Melde, Christoph Köckert, and Claus Illgen
TuE7 Optical Interference Coatings (OIC) 2004