Abstract
Control of the mechanical properties is essential for achieving reliable performance of optical thin film systems such as filters, waveguides, optical MEMS, sensors, optical films on plastic substrates and others. Mechanical properties are closely related to the film microstructure and composition, and they strongly depend on deposition technique and process parameters. In order to assure successful performance and high stability of optical films, the mechanical properties have to be optimized together with the optical characteristics and other film functional properties (electrical conductivity, thermal and environmental stability, gas or vapor permeation, hydrophobicity/hydrophilicity, etc.) [1]. Appropriate control of the film composition and of its optical and mechanical properties requires in situ real time monitoring of the deposition process such as the energetic interactions during the film growth (for example, ion bombardment, ultraviolet radiation, and the role of reactive radicals in plasma assisted processes).
© 2004 Optical Society of America
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