Abstract

Strontium barium niobate thin films on Si(001) substrates were obtained by sol-gel method. Highly c-axis oriented films were obtained by using the NbCl<sub>5</sub> precursor instead of Nb(OC<sub>2</sub>H<sub>5</sub>)<sub>5</sub>-precursor, appropriate annealing temperature and introduction of buffer layer.

© 2004 Optical Society of America

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