From the session
Materials and Properties of Optical Coatings (TuF)
Eri Fukumoto, Tomonori Aoki, and Shigetaro Ogura
Your account may give you access
We deposited MgF2 and LaF3 films on quartz glass plates as anti-reflective coatings for
VUV region, and report here their internal stress behavior, adopting in-situ stress measurement.
© 2001 Optical Society of America