Abstract

Cathodic arc deposition, combined with Ion-Assisted-Deposition (IAD), produces advanced optical and mechanical thin-films. For example, Amorphous Diamond-Like-Carbon (A-DLC), with hardness in excess of 70 GPa {diamond = 100 GPa), in multi-layer combination with Al2O3 have been deposited on temperature-sensitive substrates.

© 2001 Optical Society of America

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