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Conferences > OFT > 2021 > OTh3B > OTh3B.2

Towards understanding tool influence function (TIF) spots during hemispherical sub-aperture tool polishing

Tayyab Suratwala, Joseph Menapace, Rusty Steele, Gary Tham, Lana Wong, Nathan Ray, Brian Bauman, Michael Gregory, and Tom Hordin

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Abstract

The key mechanisms & predictive models that determine the spatially dependent material removal rate (called the tool influence function (TIF) spots) during hemispherical sub-aperture tool polishing on flat & curved fused silica glass are presented.

© 2021 The Author(s)

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