Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Influence of nanofabrication errors on optical metasurfaces performances: study and minimization strategies

Not Accessible

Your library or personal account may give you access

Abstract

Through simulation design, fabrication and characterization of optical sili- con metasurfaces, we discuss the influence of different nanofabrication errors and propose strategies to optimize the robustness of the fabrication of complex metasurfaces. [1]

© 2021 The Author(s)

PDF Article  |   Presentation Video
More Like This
Metasurface optical elements for high performing augmented/mixed-reality smart glasses

Hyunpil Boo, Yoo Seung Lee, Hangbo Yang, Brian Matthews, Tom G. Lee, and Chee Wei Wong
STu4D.5 CLEO: Science and Innovations (CLEO:S&I) 2021

Characterization of the optical performance and scatter of an infrared dielectric metasurface lens

Matthew R. Miller, Ekaterina Poutrina, Piyush J. Shah, Samuel D. Butler, Michael A. Marciniak, and Augustine M. Urbas
JTh4B.2 Flat Optics: Components to Systems (FLATOPTICS) 2021

Strong-Field Ultrafast Optics and Nanofabrication using Plasmonic Metasurfaces

Milutin Kovacev, Liping Shi, and Uwe Morgner
NTu3A.6 Nonlinear Optics (NLO) 2019

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads


More Like This
Metasurface optical elements for high performing augmented/mixed-reality smart glasses

Hyunpil Boo, Yoo Seung Lee, Hangbo Yang, Brian Matthews, Tom G. Lee, and Chee Wei Wong
STu4D.5 CLEO: Science and Innovations (CLEO:S&I) 2021

Characterization of the optical performance and scatter of an infrared dielectric metasurface lens

Matthew R. Miller, Ekaterina Poutrina, Piyush J. Shah, Samuel D. Butler, Michael A. Marciniak, and Augustine M. Urbas
JTh4B.2 Flat Optics: Components to Systems (FLATOPTICS) 2021

Strong-Field Ultrafast Optics and Nanofabrication using Plasmonic Metasurfaces

Milutin Kovacev, Liping Shi, and Uwe Morgner
NTu3A.6 Nonlinear Optics (NLO) 2019

Study on exposure strategy to minimize optical propagation losses in silicon waveguides fabricated by electron beam lithography

J. Bolten, C. Manecke, T. Wahlbrink, M. Waldow, and H. Kurz
CE_P_11 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2013

Designing Arbitrarily Large Metasurfaces using Inverse Mapping Technique

Mahdad Mansouree, Andrew McClung, and Amir Arbabi
FTu2M.8 CLEO: QELS_Fundamental Science (CLEO:FS) 2021

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved