Ion beam figuring (IBF) is a well established deterministic surface finishing technology found in high-end optics manufacturing. The paper addresses recent advancements of this technology aiming at the increase of achievable precision especially for the correction of mid-spatial wavelength surface structures by small tool functions. Furthermore, new developments for increasing productivity as well as improving machinability of difficult-to-treat materials like metal surfaces are presented.

© 2019 The Author(s)

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